UHV Vacuum Parts Cleaning Services

Wet Cleaning Capabilities

• Wet mechanical cleaning performed on any size MBE growth chamber cryo panel.
• Wet bead blasting performed on any part that will fit in the 50" x 50" cabinet.
• Acid wet chemical etch performed with one of three acid wet chemical benches on parts sized under 24" x 24".
• Base wet chemical etch performed with one of two base wet chemical benches on parts sized under 24" x 24".
• Two cylindrical air furnaces perform air baking up to 1000°C.
• Two vacuum ovens with RGA capabilities perform vacuum baking up to 1000°C.

Types of Parts Cleaned

Stainless steel, refractory metal, and PBN ceramic parts

• Stainless steel parts are base etched or mechanically cleaned, quality rinsed with DI water to 5MΩ, and baked at 200°C.
• Refractory metals are base etched, acid etched, quality rinsed with DI water to 5MΩ, and baked at 800°C.
• Ceramics are base etched, acid etched, quality rinsed with DI water to 5MΩ, and baked at 800°C either at air or under vacuum depending on the application.

Custom Cleaning Procedures

An extensive range of capabilities allows for custom-designed procedures to meet your cleaning needs.